Peltier-Type Temperature Control System for Chemicals. Fluororesin heat exchanger allows direct temperature control for chemicals!!

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Peltier-Type Temperature Control System for Chemicals Chemical Thermo-con Series Fluororesin heat exchanger allows direct temperature control for chemicals!! Temperature controller Chemical Thermo-con
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Peltier-Type Temperature Control System for Chemicals Chemical Thermo-con Series Fluororesin heat exchanger allows direct temperature control for chemicals!! Temperature controller Chemical Thermo-con Peltier device (Thermo-module) Fluororesin heat exchanger Type of circulating fluid Deionized water Hydrofluoric acid Ammonia hydrogen peroxide solution, etc. HRG HRS THERMO-CON AT SEL RET HRZ POWER ON Chemical fluid tank or chemical bath HRZD OFF Pump HRW Facility water Industry-leading withstand pressure 51 psi!! With leakage detection function Operating temperature range: 5 to 14 F Temperature stability: ±.18 F (±.1 C) Cooling capacity (with water): W, 5W, 75W International standards: SEMI Standard S2-76, F47-76 Environment friendly: RoHS (.5MPa) (1 to 6 C) HEC 171 POWER ON OFF Allows direct control of chemical temperature. PFA wetted parts material prevents contamination from metal ion elution. No need for a tube-type heat exchanger. Indirect temperature control Direct temperature control No need for a tubetype heat exchanger. Can directly control temperature of chemicals. THERMO-COM Chemical fluid tank AT SEL RET Chemical fluid tank Circulator for water Tube type heat exchanger Pump Compact and Light Temperature controller Fluororesin heat exchanger Chemical Thermo-con Series Pump Self-developed heat exchanger matched to the configuration of the Peltier device (Thermo-module). Compact and light W Existing model D H Heat Exchanger Model 5 7 W 5.1 (1) 5.9 (15) D 1.4 (26) 11.6 (294) H 6.7 (17) 8.7 (222) The outline dimensions do not include protruding parts such as the foot flange and tube. Unit: inch (mm) Weight 17.6 lbs (8 kg).9 lbs (14 kg).1 lbs (15 kg) series Peltier device (Thermo-module) W D H Temperature Controller Unit: inch (mm) Model 5 7 W.9 (1) 5.5 (14) 6.5 (165) D 12.6 (2) 1.8 (5) 17.6 (447) H 8.5 (215) 8.5 (215) 8.5 (215) Weight 1.2 lbs (6 kg) 17.6 lbs (8 kg) 28.7 lbs (1 kg) The outline dimensions do not include protruding parts such as the foot flange, screw and connector. Applications Cleaning equipment Plating equipment Wet etching equipment, etc. 172 Applicable Fluid Examples Chemical Operating temperature range Chemical Operating temperature range Deionized water Hydrofluoric acid Sulfuric acid (except fuming sulfuric acid) Copper sulfate solution 5 to 14 F (1 to 4 C) 5 to 122 F (1 to 5 C) 5 to 122 F (1 to 5 C) Ammonia hydrogen peroxide solution Sodium hydroxide Ozone water No condensation Note) Chemial Thermo-con is not designed to be explosion proof, so it is not suitable for flammable fluids. Principle of Peltier Device (Thermo-module, Thermoelectric device) The Peltier device (thermo-module, thermoelectric device) is plate-shape solid state element with P-type, N-type semiconductor arrayed alternately. When direct current is supplied to the element, heat moves from one surface to another along with electron flow in N-type semiconductor and electron hole in P-type semiconductor. As a result of the heat move, one surface of the element absorbs heat and decrease temperature. And other surface heats up. When the DC current is switched to reverse direction, the heat move will also be reverse direction. Therefore, Peltier element can achieve heating effect as well as cooling effect depending on the current direction. It can achieve high speed switching and precise temperature control. Cooling Heat suction (cooling) Circulating fluid Heating Heat generation (heating) Circulating fluid HRG Electron flow N P Electron hole flow Electron flow N P Electron hole flow HRS Facility water Current Heat radiation (heating) DC power supply Facility water Current Heat suction (cooling) DC power supply HRZ HRZD Construction and Principle HRW Noise filter Power supply switch HEC Temperature controller Controller Fan DC power supply PE Heat exchanger Peltier device (Thermo-module) Heat exchanger (Circulation fluid side) Heat exchanger (Cooling side) T Temperature sensor Circulating fluid Circulating fluid Leakage sensor Facility water Facility water The temperature controller controls the circulating fluid in the heat exchanger. A temperature sensor (platinum resistance temperature detector) installed in the heat exchanger sends a signal to the controller, which changes the temperature of the circulating fluid by adjusting the output direction and energizing time of the built-in DC power supply based on the difference between the set and measured temperatures. This product can be used safely since the sensor to detect leakage of the circulating fluid is installed as a standard device. 17 Series Model Selection Guide to Model Selection Example 1: When the heat generation amount in the customer s machine is known. Heat generation amount Q: 4 W (at 77 F (25 C)) Cooling capacity = Considering a safety factor of 2%, select 4 W x 1.2 = 48 W (at 77 F (25 C)) or more. Example 2: When the heat generation amount in the customer s machine is not known. Obtain the temperature difference between inlet and outlet by circulating the circulating fluid inside the customer s machine. Heat generation amount Q : Unknown Circulating fluid temperature difference T (= T2 T1) : 1. C (1. K) Circulating fluid outlet temperature T1 : 2 C (29.15 K) Circulating fluid inlet temperature T2 : 21 C ( K) Circulating fluid flow rate L : 7 L/min Circulating fluid : Water : Density γ: 1 x 1 kg/m : Specific heat C: 4.2 x 1 J/(kg K) HRG HRS HRZ Q = T x L x γ x C 6 x 1 = 1 x 7 x 1 x 1 x 4.2 x 1 6 x 1 Customer s machine T1: Outlet temperature Flow rate gauge L CHEMICAL SI AL HRZD =49 W Cooling capacity = Considering a safety factor of 2%, Circulating pump 49 x 1.2 = 588 W T2: Inlet temperature I N POWER O N OFF HRW Example. In cases where cooling the object below a certain temperature and period of time. Cooled substance total volume V Cooling time h Cooling temperature difference T Circulating fluid Q = = T x V x γ x C h x 6 x 1 5 x 2 x 1 x 1 x 4.2 x 1 15 x 6 x 1 = 467 W : 2 L : 15 min : 5 C (5 K) : Clear water Precautions on Model Selection Density γ: 1 x 1 kg/m Specific heat C: 4.2 x 1 J/(kg K) Cooling capacity = Considering a safety factor of 2%, 467 x 1.2 = 56 W V Circulating pump Cools 2 L of clear water from C to 25 C in 15 minutes. The flow rate of the circulating fluid depends on the internal resistance of the customer s machine and the length, diameter and resistance created by bends in the circulating fluid piping, etc. Check if the required flow rate of circulating fluid can be obtained before using. CHEMICAL I N SI AL POWER O N OFF HEC 175 Chemical Thermo-con Series SEMI RoHS How to Order Part number of set (Temperature controller + Heat exchanger) Note) The model numbers of the temperature controller and heat exchanger are printed respectively on the product name label. 7 W 2 B Chemical Thermo-con Cooling capacity W 5 5 W 7 75 W Combination in Set Part number of set -W2A1 -W2A19 -W2B1 -W2B19 5-W2A1 5-W2A19 5-W2B1 5-W2B19 7-W2A1 7-W2A19 7-W2B1 7-W2B19 Radiating method W Water-cooled Heat exchanger model -HW1 -HW19 -HW1 -HW19 5-HW1 5-HW19 5-HW1 5-HW19 7-HW1 7-HW19 7-HW1 7-HW19 1 Communication A RS-485 B RS-22C Tube size /2 x /8 /4 x 5/8 Power supply 2 Single-phase 18 to 242 VAC 5/6 Hz Temperature controller model -C2A -C2B 5-C2A 5-C2B 7-C2A 7-C2B Temperature controller Heat exchanger Heat exchanger Cooling capacity W 5 5 W 7 75 W Temperature controller 7 C 2 B Cooling capacity W 5 5 W 7 75 W 7 H W 1 Heat exchanger Tube size /2 x /8 /4 x 5/8 The tube size should be specified when ordering. Radiating method W Water-cooled Communication A RS-485 B RS-22C 176 Temperature controller Power supply 2 Single-phase 18 to 242 VAC 5/6 Hz Chemical Thermo-con Series Main Specifications (For details, please consult our Product Specifications information.) Heat Exchanger Specifications Heat exchanger model Cooling capacity (Water) Note 1) Heating capacity (Water) Note 1) Cooling/Heating method Radiating method Operating temperature range Applicable fluid Note 2) Circulating Wetted parts material Operating pressure Note ) fluid Facility water Tube size (PFA tube) Temperature Wetted parts material Max. operating pressure Tube size Flow rate Ambient temperature/humidity Dimensions Note 4) inch (mm) Weight Applied temperature controller -HW1 -HW19 5-HW1 5-HW19 7-HW1 7-HW19 W 6 W 5 W 1 W 75 W 18 W Peltier device (Thermoelectric device, Thermo-module) Water-cooled (depending on the type of circulating fluid) Deionized water, Hydrofluoric acid, Ammonia hydrogen peroxide solution, etc. PFA (atmospheric pressure) to.5 MPa 1/2 x /8 /4 x 5/8 1/2 x /8 /4 x 5/8 1/2 x /8 /4 x 5/8 5 to 95 F (1 to 5 C) (no condensation) FEP, Stainless steel 4, Stainless steel 16 7 psi (.5 MPa) /: FEP tube /8 x 1/4 1. to 2.6 gpm (5 to 1 L/min) Temperature: 5 to 95 F (1 to 5 C), Humidity: 5 to 8%RH (no condensation) W5.1 (1) x D 1.4 (26) x H6.7 (17) W5.9 (15) x D11.6 (294) x H8.7 (222) W5.9 (15) x D11.6 (294) x H8.7 (222) Approx lbs (8 kg) Approx..9 lbs (14 kg) Approx.. (15 kg) -C2A -C2B 5-C2A 5-C2B 7-C2A 7-C2B Note 1) The conditions are as follows. Circulating fluid: Water (Circulating flow rate.96 gpm (15 L/min), Set temperature 77 F (25 C), Facility water temperature 77 F (25 C), Facility water flow rate 1.2 gpm (5 L/min), Ambient temperature 77 F (25 C) Note 2) For the compatibility between the circulating fluid and materials, refer to Applicable Fluids. Note that the Chemical Thermo-con is not designed to be explosion proof so it is not suitable for flammable fluids. Note ) Install the heat exchanger in the discharge side of a circulating pump. Do not use at location where a negative pressure is applied. The circulating fluid pump should be prepared by the customer. Note 4) The outline dimensions do not included protruding parts such as the foot flange and tube. Temperature Controller Specifications Temperature controller model Communication -C2A RS-485 -C2B RS-22C 5-C2A RS C2B RS-22C 7-C2A RS C2B RS-22C Control method Operating temperature range Temperature stability Note 1) Temperature sensor Main functions Ambient temperature/humidity Cooling/Heating automatic shift PID control (no condensation) Within ±.18 F (±.1 C) (with stable load) Resistance thermometer Pt1 Ω, -wires, class A, 2 ma (for both internal control sensor and external sensor) The external sensor should be prepared by the customer. Auto-tuning, Sensor fine adjustment, Offset, Learning control, External sensor control, Set value memory, Upper/Lower temperature limit alarm, Output shutdown alarm, Remote ON/OFF, Leakage detection Temperature: 5 to 95 F (1 to 5 C), Humidity: 5 to 8%RH (no condensation) Power supply spec. Power supply Rated current Dimensions Note 2) inch (mm) Weight Applied heat exchanger A W.9 (1) x D12.6 (2) x H8.5 (215) Approx. 1.2 lbs (6 kg) -HW1 -HW19 Single-phase 18 to 242 VAC 5/6 Hz 5 A W5.5 (14) x D1.8 (5) x H8.5 (215) Approx lbs (8 kg) 5-HW1 5-HW19 14 A W6.5 (165) x D17.6 (447) x H8.5 (215) Approx (1 kg) 7-HW1 7-HW19 Note 1) This value is with a stable load with no disturbance and cannot be achieved in some operating conditions. Note 2) The outline dimensions do not included protruding parts such as the foot flange, screw and connector. Note ) The temperature controller should be connected with a specific series of heat exchanger. If connected with a different series of heat exchanger, it may not operate normally. (The and 5 series use the same connector, so be careful for incorrect wiring.) Caution Note ) For the combination of the heat exchanger and temperature controller, refer to Combination in Set. HRG HRS HRZ HRZD HRW HEC 177 Series The values shown on the performance chart are representative and not guaranteed. Allow a margin for safety to device when choosing the product. Cooling Capacity Conditions Circulating fluid: Clear water, Circulating fluid flow rate:.96 gpm (15 L/min), Facility water flow rate: 1.2 gpam (5 L/min) F F Cooling capacity (W) Facility water: 5 F (1 C) Facility water: 77 F (25 C) Facility water: 95F (5 C) Cooling capacity (W) Facility water: 5 F (1 C) Facility water: 77 F (25 C) Facility water: 95 F (5 C) Circulating fluid temperature ( C) Circulating fluid temperature ( C) F Cooling capacity (W) Facility water: 5 F (1 C) Facility water: 77 F (25 C) Facility water: 95 F (5 C) Circulating fluid temperature ( C) Heating Capacity Conditions Circulating fluid: Clear water, Circulating fluid flow rate:.96 gpm (15 L/min), Facility water flow rate: 1.2 (5 L/min) Heating capacity (W) F Circulating fluid temperature ( C) Facility water: 95 F (5 C) Facility water: 77 F (25 C) Facility water: 5 F (1 C) F 5 Heating capacity (W) F Circulating fluid temperature ( C) Facility water: 95 F (5 C) Facility water: 77 F (25 C) Facility water: 5 F (1 C) Heating capacity (W) Facility water: 5 F (1 C) Facility water: 95 F (5 C) Facility water: 77 F (25 C) Circulating fluid temperature ( C) Chemical Thermo-con Series Pressure Loss in Circulating Fluid Circuit Condition Clear water Pressure loss (kpa) gpm gpm 5 kpa 5 kpa 5 psi 5 psi 5-HW1 -HW1 7-HW HW HW HW Flow rate (L/min) Flow rate (L/min) Pressure Loss in Facility Water Circuit Condition Clear water gpm gpm 1 kpa 1 kpa 15 psi 15 psi HRW HRZD HRZ HRS HRG Flow rate (L/min) Flow rate (L/min) HEC Pressure loss Pressure loss (kpa) Pressure loss REMOTE ON/OFF EXT.SENSOR + - FG A B B FG SIGNAL DC SIGNAL DC ALARM COMMUNICATION REMOTE ON/OFF + - FG AC EXT.SENSOR A B B FG ALARM COMMUNICATION AC Series Dimensions Unit: inch (mm) -W2 Temperature controller -C2.9 (1) Display panel DC cable 16.4 ft (5 m) 1.6 (27) 4. (11) Signal cable 16 ft (5 m) Circulating fluid.8 (2) outlet.8 (21) 2.6 (65) Heat exchanger -HW 4.1 (1) 5.1 (1) 12.6 (2) (1.2 ))) Communication connector The RS-22C uses only lower side connector. Alarm output connector Terminal block POWER O N OFF Power switch Purge outlet (M5) 8.5 (215) CHEMICAL I N SI AL Facility water outlet /8 x 1/4 6.7 (17) 5.6 (14) 4.7 (12) Purge inlet (M5) 1.6 (41) Facility water inlet /8 x 1/4 Circulating fluid inlet.2 (5) (1.6 (4)).87 (22).4 (1) Fluid leak sensor Model no. label (Heat exchanger) 1. (26) 12. (5) 11.2 (285).8 (2) Model no. label (Controller) (.8 (2)) (.4(1)). (7) Signal connector. (75) 1.1 (29) DC connector 78.7 (2).8 (97). (75) 2.1 (5) 1.1 (28) Power connector.1 (79). (7) 2.6 (66) 1.4 (5) Circulating Fluid Tube Size Heat exchanger model -HW1 -HW19 5-W2 Circulating fluid tube size 1/2 x /8 /4 x 5/8 .4 (1) 14.6 (7) 1.8 (5) 1.26 (2).24 (6) (.9 (1)).24 (6) 2. (5) 1. (25) Power Cable (Accessory) Connector: IEC 62 C1 or equivalent Cable: 14AWG, O.D. ø8.4 Wire color Black 1 Black 2 Green/Yellow Contents 18 to 242 VAC 18 to 242 VAC PE Temperature controller Heat exchanger 5-C2 5-HW Signal cable 16.4 ft (5 m) DC cable 16.4 ft (5 m) 5.5 (14) Display panel 1.1 (29). (75) 4.8 (122) 5.9 (15) Circulating fluid outlet 8.7 (222).8 (2) 1.8 (5) 1.2 () Communication connector The RS-22C uses only right side connector. Model no. label (Controller) Alarm output connector Terminal block SI AL 7.4 (187) POWER O N OFF Power switch 8.5 (215) Purge outlet (M5) CHEMICAL I N Facility water outlet /8 x 1/4 Circulating fluid inlet 7. (177) Purge inlet (M5) 1.7 (44) 1.65 (42) Facility water inlet /8 x 1/4 .2 (5) (5.5 (14)).7 (18).4 (1) Fluid leak sensor Model no. label (Heat exchanger) 11.6 (294) 1. () 12.2 (1) (.7 (18)) (.4 (1)) 4.6 (116) (17) (7).8 (2) Signal connector DC connector 4. (11) 78.7 (2) 2.7 (69) 1.9 (49) 1.1 (29) Power connector.1 (79) 2.2 (56) 1.1 (29). (75) 1. (4) Circulating Fluid Tube Size Heat exchanger model Circulating fluid tube size 5-HW1 1/2 x /8 5-HW19 /4 x 5/8 .4 (1) 15.7 (4) 15. (8).28 (7) (.4 (1)).9 (1) (2) (6) Power Cable (Accessory) Connector: IEC 62 C1 or equivalent Cable: 14AWG, O.D. ø8.4 Wire color Contents Black 1 18 to 242 VAC Black 2 18 to 242 VAC Green/Yellow PE (6) REMOTE ON/OFF - FG DC EXT.SENSOR A B B FG SIGNAL AC Chemical Thermo-con Series Dimensions 7-W2 Temperature controller Heat exchanger 7-C2 7-HW DC cable 16.4 ft (5 m) 6.5 (165) Display panel POWER O N OFF Power switch 8.46 (215) 1.1 (29). (75) CHEMICAL I N 4.8 (122) 5.9 (15) SI AL Circulating fluid inlet Purge outlet (M5) Facility water outlet /8 x 1/4 8.7 (222) 7. (177) 1.7 (44) 1.65 (42) Facility water inlet /8 x 1/4 Circulating Fluid Tube Size Heat exchanger model 7-HW1 7-HW (187) Circulating fluid tube size 1/2 x /8 /4 x 5/8 Signal cable 5 m Circulating fluid outlet.8 (2).2 (5).7 (18) (5.5 (14)) Purge inlet (M5).4 (1).5 (12).24 (6) 4. (11) 1.8 (27.5).24 (6) Fluid leak sensor Model no. label (Heat exchanger) 11.6 (294) 1. () 12.2 (1) 17.6 (447) 19.6 (499) 18.7 (475).7 (18) Model no. label (Controller) (.4 (1)).28 (7).28 (7) 4.6 (116).7 (17) 1. (2).24 (6).8 (2) (.5 (12)).24 (6) 5.5 (14).49 (12.5) Communication connector The RS-22C uses only upper side connector. Terminal block DC connector Alarm output connector Signal connector 5.7 (145) COMMUNICATION ALARM (12). (8) 1. () Fan Power connector 7.4 (189) 5.9 (149) 4. (19) 1. () HEC HRW HRZD HRZ HRS HRG 78.7 (2) Power Cable (Accessory) Connector: DDK CE5-6A18-1SD-D-BSS Cable: 12AWG, O.D. ø11.8 Wire color Contents Black 1 18 to 242 VAC Black 2 18 to 242 VAC Green/Yellow PE 181 Series Connectors Use the special power cable included with the temperature controller. Connect the DC cable and signal cable that come from the heat exchanger to the DC and signal connectors of the temperature controller. Prepare other required connectors and wiring by the customer. 1. Power connector For -C2, 5-C2 IEC 62 C14 or equivalent Connect the included special power cable. Pin No. 1 2 Pin No. 1 2 Signal contents 18 to 242 VAC 18 to 242 VAC PE For 7-C2 DDK Ltd. CE5-2A18-1PD-D Connect the included special power cable. Pin No. Signal contents D A A 18 to 242 VAC B 18 to 242 VAC C B C Unused D PE Power connector (7-C2) 2. DC connector For -C2, 5-C2 Nanaboshi Electric Mfg. Co., Ltd.: NJC-24-RF (UL, CSA) 2 1 Connect the DC cable connector of the heat exchanger. Signal contents DC output DC output FG For 7-C2 DDK Ltd. D/MS12A2-15S Connect the DC cable connector of the heat exchanger.. Signal connector Common to -C2, 5-C2, 7-C2 Tajimi Electronics Co., Ltd.: TRC1-A16R-1FA Connect the signal cable connector of the heat exchanger. 182 Pin No. A B C D E F G Signal contents DC output DC output DC output DC output DC output DC output FG Pin No. Signal contents 1 Thermostat + 2 Thermostat Terminal A of resistance temperature detector 4 Terminal B of resistance temperature detector 5 Terminal B of resistance temperature detector 6 Fluid leak sensor +24 V 7 Fluid leak alarm signal input 8 Fluid leak 24VE 9-1 Unused Grounding FG B 1 C A 2 Power connector (-C2, 5-C2) DC connector (-C2, 5-C2) 9 G D 8 1 F DC connector (7-C2) E Signal connector 4. Terminal block Common to -C2, 5-C2, 7-C2 Morimatsu Co., Ltd.: M111A-7A, for holding screw M Connection cable: 22AWG or more, max. 2.8 feet (1 m) Pin No. Signal contents 1 Remote ON/OFF Remote ON/OFF FG 4 External sensor: Terminal A of resistance temperature detector 5 External sensor: Terminal B of resistance temperature detector Terminal block 6 External sensor: Terminal B of resistance temperature detector 7 FG A short pin is installed between No. 1 and No. 2 pins to short-circuit it (Remote ON) when shipped. Remote ON/OFF signal Circuit voltage: 24 VDC ±1%; passing current: 2.9 to 4. ma Exterior sensor signal Applicable sensor: Pt1 Ω; passing current: 2 ma 5. Alarm output connector: D-sub 9 pin Common to -C2, 5-C2, 7-C2 OMRON Corp. XM2A-91 or equivalent, holding screw M2.6 Fixed contact point (load resistance: 125 VAC,. A; VDC, 2 A) Connection cable: With shielding 22AWG or more, max. 2.8 feet (1 m) Pin No. Signal contents 1 Contact a for output cut-off alarm (open when alarm occurs) 2 Common for output cut-off alarm Contact b for output cut-off alarm (closed when alarm occurs) 4 Contact a for upper/lower temp. limit alarm (open when alarm occurs) 5 Common for upper/lower temp. limit alarm 6 Contact b for
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